发明名称 SURFACE TREATMENT APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a surface treatment apparatus which can uniformly process the surface of an area in a material to be processed without leaking a processing gas when the material is subject to partly surface processing. SOLUTION: The processing area F1 of a work W is arranged opposite to the processing surface 43 of a processing head 1 for jetting a processing gas, and the processing gas is fed between the processing surface 43 and the processing area F1 to process the surface of the work W. In the apparatus M having such a mechanism, the processing head 1 is provided with an exhaust port 41a adjacent to the processing surface 43 in order to discharge the processing gas, and the processing surface 43 is projecting toward the work W from the surface of the processing head 1 facing the work W. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006261284(A) 申请公布日期 2006.09.28
申请号 JP20050074694 申请日期 2005.03.16
申请人 SEKISUI CHEM CO LTD 发明人 OTSUKA TOSHIHIRO
分类号 H01L21/3065;C23C16/455;C23F4/00;H01L21/304 主分类号 H01L21/3065
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