| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-destructive inspection method capable of narrowing a troubled place, and an inspection device. SOLUTION: The images of magnetic field distributions obtained by scanning the laser beam respectively thrown on first and second samples are acquired (first step) and, when there is a difference between the images of the magnetic field distributions, current images are respectively acquired from the magnetic field distributions acquired by scanning the first and second samples by a magnetic field sensor in a state that the predetermined places of the first and second samples are irradiated with the laser beam (second step). The difference between the current images is taken to discriminate the difference between the current routes related to the predetermined places of the first and second samples from the difference image. COPYRIGHT: (C)2006,JPO&NCIPI
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