| 摘要 |
PROBLEM TO BE SOLVED: To surely wash even a work to be cleaned which has blind holes etc., and is difficult to be washed by washing the work by surely exerting ultrasonic wave on the work. SOLUTION: In the ultrasonic washing method, washing is performed by exerting ultrasonic wave on the work in the state where the work 22 is set on a washing tank 10, washing liquid 30 is supplied to the washing tank 10, thereafter, the washing tank 10 is evacuated and, subsequently, the washing tank 10 is opened to the atmosphere. Wherein, the ultrasonic washing method is provided with: a process where, when the work 22 is set on the washing tank 10, an inner tank 24 is arranged so as to cover the upper side and the lateral side of the work, the washing tank 10 is evacuated, thereafter, the washing tank 10 is opened to the atmosphere, thereby, the inner tank 24 is filled with the washing liquid 30 and, in such a state, ultrasonic wave is exerted on the washing liquid; and a process where, after exerting ultrasonic wave on the washing liquid 30 for a prescribed time, the washing tank 10 is evacuated and the washing liquid 30 filled in the inner tank 24 is discharged from a washing area of the inner tank 24. COPYRIGHT: (C)2006,JPO&NCIPI
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