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发明名称
METHOD FOR FABRICATING METAL PLUG OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20060102712(A)
申请公布日期
2006.09.28
申请号
KR20050024592
申请日期
2005.03.24
申请人
HYNIX SEMICONDUCTOR INC.
发明人
OH, JAE MIN;LIM, SUNG WON;JIN, SUNG GON;KIM, BAEK MANN
分类号
H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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