| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable to highly accurately measure an optical characteristic by manufacturing an inexpensive sensor having high resolution. <P>SOLUTION: The optical characteristic measurement instrument has a pixel in which detectors 95 for outputting a detection signal including information about the optical characteristic of a projection optical system PL are arranged in a Z-axis direction, and the linear sensor 95a successively outputs a detection signal including information about the optical characteristic of the projection optical system PL while moving in an X-axis direction via linear motors LM1, LM2. Thus, although a linear sensor is used more easily manufactured than an area sensor having pixels arranged in an XZ surface, detection signals in the entire XZ surface can be output, and the instrument has the function similar to that of the area sensor having pixels arranged in the XZ surface. In this case, since a sensor having high resolution can be inexpensively manufactured, the measurement of highly accurate optical characteristic (wavefront aberration etc. ) can be performed, and the entire instrument can be inexpensively manufactured. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
