Polymer structure on a substrate, to accommodate a piezo electric resonator, is formed by an adhesive bonding layer and a polymer layer reduced to an island at the required substrate surface zone

摘要

To form a polymer structure (21) on a defined zone of a substrate (11) surface, an adhesive bonding layer (13) is applied using one polymer material. The bond is removed from the surface leaving a bonding layer island (15) in the required location. A further layer (17) is applied, of a second polymer, and cleaned off leaving a layer cover (19) over the first island layer for a polymer structure of the required height (23) and width (25). The layers are of a SU-8 photo varnish of different viscosities containing different plastics components.