| 摘要 |
PROBLEM TO BE SOLVED: To provide a monomolecular film forming method for forming a homogeneous monomolecular film in a predetermined region on a substrate without the need for a complicated device and a great amount of waste liquid treatment and for forming a two-dimensional array structure consisting of a plurality of different monomolecular film regions on the same substrate without undergoing multiple processes. SOLUTION: First, a coupling agent 2 of alkoxysilane is applied to a predetermined region on the surface of the substrate subjected to hydrophilizing treatment, using a manipulator 3. Then, in the state of being held for a certain time in a non-oxygen atmosphere containing no oxygen under predetermined humid environment, the silane coupling agent 2 reacts with the surface of the substrate and the silane coupling agent 2 is fixed to the substrate 1. When different silane coupling agents 2a, 2b, 2c are applied to predetermined positions on the substrate, the two-dimensional array structure is manufactured in one process where nano materials different in type are fixed. COPYRIGHT: (C)2006,JPO&NCIPI |
