| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface modification method which is implemented by controlling cavitations and intensifying the strength of a crushing impact force, to thereby efficiently modify the surface of a material. SOLUTION: According to the surface modification method for a metallic material, a semiconductor material, etc., a preliminary cavitation generator is arranged on an upstream side of a channel, and a vortex generator for generating large vortexes is arranged on a downstream side of the channel across a predetermined interval sufficient for generation of residual minute bubbles. After the generation of preliminary cavitation by the preliminary cavitation generator, a liquid containing residual minute bubbles generated by crushing preliminary cavitation bubbles as cavitation cores, is produced, followed by pouring and injecting the liquid containing the cavitation cores therein into the vortex generator, to thereby generate large vortex cavitation. Then the vortex cavitation is collided against the metallic material or the semiconductor material, and by a strong impact force generated by collapse of the vortex cavitation bubbles, the surface modification of the metallic material or the semiconductor material is achieved. COPYRIGHT: (C)2006,JPO&NCIPI
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