PROCESS FOR PRODUCING THIN NITRIDE FILM ON SAPPHIRE SUBSTRATE AND THIN NITRIDE FILM PRODUCING APPARATUS

摘要

A process for producing a thin nitride film on a sapphire substrate, in which using no resists, miniaturization can be accomplished while relieving vexatious complication of the process; and a relevant thin nitride film producing apparatus. There is provided a process for producing a thin nitride film on a sapphire substrate, comprising irradiating a sapphire substrate having undergone high-temperature hydrogen treatment with electron beams and depositing a thin nitride film on the substrate having undergone the electron beam irradiation according to an organometallic chemical deposition technique to thereby accomplish portraying of thin nitride film.