PRECURSOR COMPOSITION FOR POROUS MEMBRANE AND PROCESS FOR PREPARATION THEREOF, POROUS MEMBRANE AND PROCESS FOR PRODUCTION THEREOF, AND SEMICONDUCTOR DEVICE

摘要

Disclosed is a precursor composition for a porous membrane comprising at least one compound selected from a compound represented by the formula: Si(OR¹)₄ and a compound represented by the formula: R_a(Si)(OR²)_4-a (wherein R¹ represents a monovalent organic group; R represents a hydrogen atom, a fluorine atom or a monovalent organic group; R² represents a monovalent organic group; and a is an integer of 1 to 3, provided that R, R¹ and R² may the same as or different from one another), a thermally decomposable organic compound which is thermally decomposed at a temperature of 250°C or higher, an element having a catalytic effect and an organic solvent. A solution of the precursor composition can be subjected to the gas phase polymerization with a hydrophobic compound to produce a hydrophobic porous membrane having a low dielectric constant, a low refraction index and a high mechanical strength. Also disclosed is a semiconductor device having the porous membrane.