| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of performing proper inspection corresponding to the state change äinitial trial production (initial stage) to trail mass production (adjustment stage) to mass production (stable state)} of failure appearance occurring in article production or the like. SOLUTION: In the adjustment stage wherein estimation accuracy of a shape in a normal domain is in the insufficient state, abnormality determination by MTS and abnormality determination by one-class SVM are executed together to waveform data of an inspection object, and the final abnormality determination is performed based on both determination results. In the adjustment stage, each range of both determination functions do not agree with each other, and the determination results sometimes agree with each other and sometimes do not as shown in Fig. (a). In this case, fuzzy inference shown in Fig. (b) is performed, and when the determination results agree with each other, the result is treated as the final result, and when the results are different, GRAY is taken. Since both determination results has no difference while a distribution of non-defective articles or the shape of the normal domain is stabilized, the abnormality determination is executed based on only MTS to the waveform data of the inspection object. COPYRIGHT: (C)2006,JPO&NCIPI
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