| 摘要 |
Grooves are formed in a supporting plate around element-arrangement areas in which a plurality of piezoelectric elements are to be arranged respectively. After forming the grooves, the piezoelectric elements are formed in the element-arrangement areas respectively by making particles of a piezoelectric material to be deposited on the element-arrangement areas in an amount which is more than an amount of the particles of the piezoelectric material made to be deposited on areas formed with the grooves. Accordingly, there is provided a method of producing a piezoelectric actuator and a piezoelectric actuator which make it possible to easily form the piezoelectric elements arranged densely.
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