发明名称 Atomic force microscope and method of energy dissipation imaging using the same
摘要 An atomic force microscope and method of energy dissipation imaging using such atomic force microscope. The atomic force microscope has a cantilever equipped with a probe for making contact with a sample, a vibrating unit for vibrating the cantilever, a vibration control unit for controlling the vibrating unit based on a preset value of amplitude, a vibration detector for detecting the amplitude of the vibration of the cantilever, and an imaging unit for creating an energy dissipation image based on the vibration of the cantilever. Error information based on the difference between the value of amplitude detected by the amplitude detection unit and the preset value of amplitude is fed back to the vibrating unit. Thus, the vibrating unit vibrates the cantilever to drive it into resonance. The imaging unit creates an energy dissipation image based on the difference information.
申请公布号 US2006213260(A1) 申请公布日期 2006.09.28
申请号 US20060375686 申请日期 2006.03.14
申请人 JEOL LTD. 发明人 NAKAMOTO KEIICHI
分类号 G01B5/28;G01Q60/32 主分类号 G01B5/28
代理机构 代理人
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