OPTICAL WAVEGUIDE DEVICE, MANUFACTURING METHOD THEREOF AND OPTICAL COMMUNICATION APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide an optical waveguide device which simplifies the manufacturing porcess of the optical waveguide device and manufacturing the optical waveguide device with high accuracy and a manufacturing method thereof. SOLUTION: When a base substrate and an optical waveguide mother board are integrally bonded, ultraviolet-curing resin 20a is supplied between a lower surface of a lower cladding layer 18 and an upper surface of the silicon substrate 21b and a spacer 32 provided on the upper surface of the silicon substrate 21b of the base substrate is brought into contact with the lower surface of the lower cladding layer 18. An upper cladding layer 20 is formed by curing the ultraviolet-curing resin 20a in an optical waveguide region of the optical waveguide mother board by covering an unnecessary part of the optical waveguide mother board with a mask 36a and irradiating the ultraviolet-curing resin 20a with ultraviolet rays. Next, a boundary between the unnecessary part of the optical waveguide mother board and an optical wageguide formation region is cut with a dicing blade and the unnecessary part of the optical waveguide mother board is removed. COPYRIGHT: (C)2006,JPO&NCIPI