| 摘要 |
PROBLEM TO BE SOLVED: To provide a wet treatment apparatus and a wet treatment method which enable the reduction of the equipment cost and environmental load and are capable of treating an object of the treatment or a substrate with a fluid irrespective of the electric characteristics of the substrate i.e. being conductive or insulative. SOLUTION: The wet treatment apparatus 1 comprises a nozzle 12 equipped with a perforated section 12a through which a fluid 19 passes, a planar catalyst member 13 which covers the section 12a and is permeable to water and capable of increasing ion concentration of the fluid 19, and an electrode member 14 equipped with a coaxial hole which covers the planar catalyst member 13. The apparatus ejects the fluid 19 onto an object 20 to be treated while voltage is being applied between a voltage applying section 17 of the electrode member 14 and the perforated section 12a of the nozzle 12. Thereby the wet treatment apparatus 1 feeds the fluid 19 containing an active species onto the surface of the object 20 and treats the surface of the object 20. COPYRIGHT: (C)2006,JPO&NCIPI
|
