| 摘要 |
PROBLEM TO BE SOLVED: To stably generate the required amount of a film in generating the film on the surface of an object to be treated by applying a water soluble treating liquid to the object to be treated and utilizing the chemical reaction of the object to be treated and the water soluble treating liquid component. SOLUTION: In the method for manufacturing the water soluble treating liquid of generating the film on the surface of the object to be treated by applying the water soluble treating liquid to the object to be treated and utilizing the chemical reaction of the object to be treated and the water soluble treating liquid component, the treating liquid of the previously known concentration of the component of the treating liquid is applied to the object to be treated, and the moisture content in the treating liquid is measured and the amount of the treating liquid to be applied to the object to be treated is controlled by the measured value of the moisture content. COPYRIGHT: (C)2006,JPO&NCIPI
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