PRODUCTION METHOD FOR VACUUM COMPONENT, RESIN COATING FORMING DEVICE AND VACUUM FILM FORMING SYSTEM

摘要

A production method for a vacuum component and a resin coating forming device capable of easily forming resin coating on an internal flow path complicated in shape. The resin coating forming device (21) comprises a monomer vapor supplying unit (23), a vacuum exhaust line (24) for transporting monomer vapor, a connection unit (24c) connectable with the internal flow path of a vacuum component (22A) provided on part of a vacuum exhaust line (24), and a component temperature regulating mechanism (31) for depositing the monomer vapor onto the internal flow path of the vacuum component (22A) connected with this connection unit (24c) to form resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the vacuum component (22A) by merely exposing the internal flow path to monomer vapor.