Target used to form a hard film

摘要

A hard film for cutting tools which is composed of (Ti1-a-b-c-d' Ala' Crb, Sic, Bd)(C1-eNe) 0.5 ≤ a ≤ 0.8, 0.06 ≤ b, 0 ≤ c ≤ 0.1, 0 ≤ d ≤ 0.1, 0 ≤ c+d ≤ 0.1, a+b+c+d < 1, 0.5 ≤ e ≤ 1 (where a, b, c, and d denote respectively the atomic ratios of Al, Cr, Si, and B, and e denotes the atomic ratio of N.)