| 摘要 |
<p>A method for a piezoelectric actuator and an ink-jet head uses, for forming a lower electrode 3 on a vibration plate 2, metal-nano particles which can start to sinter with a low temperature as a conductive material; and uses, for forming a piezoelectric layer 4, an aerosol deposition method requiring no calcination step. Accordingly, upon forming the lower electrode and piezoelectric layer, any calcination under severe condition is not needed. In addition, the calcination of the lower electrode 3 can be advanced simultaneously with an annealing step required after forming the piezoelectric layer 4. Accordingly, the thermal cycle during producing process can be minimized, thereby suppressing the exfoliation of layers and diffusion of material forming vibration plate into the piezoelectric layer due to thermal history, and consequently lower the degradation of piezoelectric characteristics.</p> |
