GAS BARRIER FILM, SUBSTRATE FILM, AND ORGANIC ELECTROLUMINESCENCE DEVICE

摘要

A gas barrier film comprising a gas barrier laminate on a substrate film, wherein the gas barrier laminate comprises at least one three-layer unit consisting of a silicon nitride layer, a silicon oxynitride layer adjacent to the silicon nitride layer, and a silicon nitride layer adjacent to the silicon oxynitride layer. The gas barrier film has excellent transparency and gas barrier property.