发明名称 Semiconductor device having an alignment mark formed by the same material with a metal post
摘要 A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located in predetermined positions of the redistribution layer. Metal posts configured to be provided with external connection electrodes are formed on the electrode pads of the redistribution layer. A mark member made of the same material as the metal posts is formed on the redistribution layer. The mark member serves as an alignment mark located in a predetermined positional relationship with the metal posts.
申请公布号 US7112889(B1) 申请公布日期 2006.09.26
申请号 US20000577932 申请日期 2000.05.25
申请人 FUJITSU LIMITED 发明人 MARUYAMA SHIGEYUKI;ITOH YASUYUKI;HONDA TETSUROU;TASHIRO KAZUHIRO;HASEYAMA MAKOTO;NAGASHIGE KENICHI;YONEDA YOSHIYUKI;MATSUKI HIROHISA
分类号 G01R31/26;H01L23/544;G01R31/28;H01L21/00;H01L21/301;H01L21/56;H01L21/66;H01L21/683;H01L23/00;H01L23/12;H01L27/00 主分类号 G01R31/26
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