发明名称 |
Beam directing system and method for use in a charged particle beam column |
摘要 |
A method and system are presented for directing a charged particle beam towards and away from a sample. The system comprises a lens arrangement having an electrode formed with a beam opening for a charged particle beam passage therethrough; and a magnetic deflector. The magnetic deflector has a magnetic circuit formed by a core part for carrying excitation coils and a polepieces part. The polepieces of the magnetic deflector are in electrical communication with the electrode of the lens arrangement and are electrically insulated from the other part of the magnetic circuit.
|
申请公布号 |
US7112803(B2) |
申请公布日期 |
2006.09.26 |
申请号 |
US20040897635 |
申请日期 |
2004.07.23 |
申请人 |
APPLIED MATERIALS, ISRAEL, LTD. |
发明人 |
PETROV IGOR;KRIVTS (KRAYVITZ) IGOR;KARABEKOV ALBERT |
分类号 |
H01J37/10;H01J37/147 |
主分类号 |
H01J37/10 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|