BAFFLE PLATE AND PLASMA ETCHING DEVICE HAVING SAME,申请号KR20047018621-传众专利搜索

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发明名称	BAFFLE PLATE AND PLASMA ETCHING DEVICE HAVING SAME
摘要
申请公布号	KR100627324(B1)	申请公布日期	2006.09.25
申请号	KR20047018621	申请日期	2004.11.18
申请人		发明人
分类号	H01L21/3065;H01J37/32;H01L21/02	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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