| 摘要 |
A piezoelectric element with stable and excellent piezoelectric properties is made by: a step of forming a diaphragm 30 ( 31, 32 ) on a substrate 20 (S 1 ); a step of forming a bottom electrode 33 on the diaphragm 30 (S 2 ); a step of forming a first piezoelectric layer 43 a on the bottom electrode 33 (S 3 ); a step of patterning both the piezoelectric layer 43 a and the bottom electrode 33 (S 4 ); a step of forming a second piezoelectric layer on the piezoelectric layer 43 a and on the diaphragm 30 to mature a piezoelectric film 43 (S 5 ); and a step of forming a top electrode 44 on the piezoelectric film 43 (S 6 ).
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