发明名称 Nonvolatile memory device and method of manufacturing the same
摘要 Provided is a nonvolatile memory device and a method of manufacturing the same. The nonvolatile memory device includes a semiconductor substrate on which a source, a drain, and a channel region are formed, a tunneling oxide film formed on the channel region, a floating gate formed of a fullerene material on the tunneling oxide, a blocking oxide film formed on the floating gate, and a gate electrode formed on the blocking oxide film.
申请公布号 US2006212976(A1) 申请公布日期 2006.09.21
申请号 US20060357221 申请日期 2006.02.21
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KHANG YOON-HO;LEE KYO-YEOL;LEE EUN-HYE;LEE JOO-HYUN
分类号 H01L51/40 主分类号 H01L51/40
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