| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a glass original disk in which the roughness of the side wall of a concave part is reduced. SOLUTION: The method comprises of a process in which after a photoresist 2 is applied on a quartz glass substrate 1 and the photoresist 2 is exposed using a laser beam, development is performed and a photoresist pattern 4 is formed, a process in which the photoresist pattern 4 is irradiated with ultraviolet rays in an inert gas state in which oxygen does not exist, a process in which after the quartz substrate 1 irradiated with ultraviolet rays is placed on one side of a pair of electrodes arranged oppositely in a reactive ion etching apparatus and evacuated, and a process in which a fluorocarbon system gas and an Ar gas mixed at a prescribed rate are introduced, high frequency power is applied between the pair of electrodes, dry etching is performed making the photoresist pattern 4 as a mask in a state of prescribed gas pressure, a concave part 5 is formed on the surface of the quartz glass substrate 1. COPYRIGHT: (C)2006,JPO&NCIPI
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