| 摘要 |
A capacitive element includes a base member 10 , an underlying insulating film 11 formed on the base member 10, a capacitor Q constructed by forming a lower electrode 13, a capacitor dielectric film 14, and an upper electrode 15 sequentially on the underlying insulating film 11, a lower protection insulating film 16 a formed on the upper electrode 15 to cover at least a part of the capacitor Q, and an upper protection insulating film 16 b formed on the lower protection insulating film 16 a and having a wider energy band gap than the lower protection insulating film 16 a.
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