发明名称 MACHINING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a machining apparatus, preventing water drops from adhering to the surface of a transparent protective cover to maintain the transparency of the protective cover for long time, and further decreasing the frequency of cleaning the protective cover to improve productivity. SOLUTION: This machining apparatus 1 includes: a machining means 10 for machining a workpiece while machining water is supplied to the workpiece; and a transparent protective cover 20 for covering the whole or part of the periphery of the machining means 10, wherein the inner surface of the protective cover 20 has hydrophilic property. In this case, a hydrophilic coating 26 may be formed on the inner surface of the protective cover 20 so that the inner surface of the protective cover 20 has hydrophilic property. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006247760(A) 申请公布日期 2006.09.21
申请号 JP20050064393 申请日期 2005.03.08
申请人 DISCO ABRASIVE SYST LTD 发明人 SATO MASAMI
分类号 B23Q11/08;H01L21/301 主分类号 B23Q11/08
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