| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning apparatus for cleaning the inside of a die head of a die coater with a cleaning liquid and a method of cleaning the inside of the die head using the same. SOLUTION: The inside of the die head is cleaned by providing a liquid pool where the cleaning liquid discharged from the tip of a slit of the die head and after mounting a detachable cleaning cover for covering the tip part of the die head in tightly closed state to cover the tip of the die head, sending the cleaning liquid to a manifold of the die head, a slit and the liquid pool of the cleaning cover through a control valve while adjusting the quantity of the cleaning liquid to be supplied and vibrating the cleaning liquid with an ultrasonic vibrator transducer mounted on the cleaning cover, a die head block, a supply pipe or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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