| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface accuracy measuring method for highly accurately measuring even a minute undulation element without being affected by a focusing error or imaging aberration. <P>SOLUTION: According to this surface accuracy measuring method, interference fringes are detected by a detector 16 to find the amount of undulation element on a surface 22a under inspection, the interference fringes formed by a light beam LW under inspection comprising reflection light produced on the surface 22a and a reference light beam LR having a wave surface of a prescribed shape. In this measuring method, a filter F is used for limiting the light beam LW entering the detector 16 to two light beams comprising one of ±primary diffracted light beams obtained by diffracting/reflecting the light beam LW by the surface 22a owing to the undulation element on the surface 22a and a 0-th diffracted light beam obtained by regularly reflecting the light beam LW by the surface 22a. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
