发明名称 CERAMIC PRODUCT, PROBE CARD, AND METHOD FOR PRODUCTION OF CERAMIC PRODUCT
摘要 <p><P>PROBLEM TO BE SOLVED: To solve such problems that when processing such as boring is performed by irradiating a ceramic material comprising metal oxides or nitrides with a laser, a melt decomposed material including the metals generated by decomposition reaction is adhered to a processed portion such as a processed cross-section or its periphery, and though a plurality of solutions for removing such adherent melt, for example, by etching treatment using an acid after a laser process are provided, none is satisfactory. <P>SOLUTION: A ceramic product 1 is obtained by irradiating the portion of the ceramic material to be processed with the laser and then spraying media for sandblasting on the cross-section of the processed portion (holes 7) toward the nearly same direction as that of laser irradiation during laser processing to grind the processed cross-section. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006248861(A) 申请公布日期 2006.09.21
申请号 JP20050069846 申请日期 2005.03.11
申请人 NGK SPARK PLUG CO LTD 发明人 MAEDA TETSUYA;HARA YASUSHI
分类号 C04B41/91;B23K26/38;B23K26/40;B24C1/00;G01R1/073;G01R31/26;H01L21/66 主分类号 C04B41/91
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