PLASMA SOURCE INTERNAL DISCHARGING BRIDGE,申请号KR20050051638-传众专利搜索

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发明名称	PLASMA SOURCE INTERNAL DISCHARGING BRIDGE
摘要
申请公布号	KR100629231(B1)	申请公布日期	2006.09.21
申请号	KR20050051638	申请日期	2005.06.15
申请人	NEW POWER PLASMA CO., LTD.	发明人	CHOI, DAI KYU
分类号	H01L21/3065	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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