| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultrasonic levitation device that can be made to have a higher maximum allowable load and is suitable for downsizing and enhancing its rigidity to angular moment. SOLUTION: The ultrasonic levitation device is equipped with a stationary section, a movable section disposed to be movable relative to the stationary section, and a vibration generator that generates ultrasonic vibration disposed in the stationary section or in the movable section, so that the ultrasonic vibration generated by the ultrasonic vibration generator causes the movable section to levitate above the levitation surface, which is characterized in that the shape of the transverse cross section of the stationary section or the movable section is symmetrical or roughly symmetrical with respect to a line direction that intersects at right angles with the direction of the main vibration. COPYRIGHT: (C)2006,JPO&NCIPI
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