| 摘要 |
PROBLEM TO BE SOLVED: To remove foreign matter stuck on the surface of a cleaned material without breaking an element or the like formed on the surface of a material to be cleaned by decreasing the the quantity of jetting gas to be used and making the diameter of droplets jetted to the material to be cleaned uniform. SOLUTION: The two fluid nozzle is constituted of a mixing part for mixing a gas with liquid, a gas flow passage for introducing the gas to the mixing part, and a spiral structure provided in the gas flow passage and for turning the gas. COPYRIGHT: (C)2006,JPO&NCIPI
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