SEPARATED PHASE BY USING PHASE SEPARATION, NANO-STRUCTURE ELEMENT, AND METHOD FOR FORMING NANO-STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a separated phase with functionality in a matrix, by impregnating a nano-hole with a plated film of an alloy and phase-separating a phase having crystallinity from the alloy, particularly for forming a nano-structure element for making use of properties of the separated phase, and a nano-structure consisting of a large number of the elements regularly arranged on a substrate. SOLUTION: The method for forming the separated phase comprises the steps of: forming a plated alloy film by electroplating a plurality of metals while controlling their deposition potentials on the substrate; and separating the phases in the plated film into Cu of a first component of a non-magnetic metal, and a ferromagnetic substance or an antiferromagnetic substance of a second component by heat treatment to form the separated phase of the second component. The nano-structure element is obtained by forming the separated phase by separating the phases of the plated alloy film formed in the nano-hole, and then the properties such as magnetism, electric resistance and thermal conduction in the separated phase can be used. The nano-structure can be formed by using the nano-structure element. COPYRIGHT: (C)2006,JPO&NCIPI