| 摘要 |
PROBLEM TO BE SOLVED: To provide a new particulate catching apparatus which enables separation and recovery of particulates of about 0.1-10μm in high efficiency. SOLUTION: The apparatus has a constitution that a cabinet 2 which can maintain a secrecy, and a filter unit 5 arranged inside the cabinet 2 are provided to separate a particulate G from a treatment gas A supplied to an air inlet 20 formed on the cabinet 2 or an inlet port 57 formed on the filter unit 5. The apparatus is characterized in that a filter element 55 provided on the filter unit 5 is formed by a hollow fiber membrane to separate the particulate of about 0.1-10μm from all over the gas in high efficiency. COPYRIGHT: (C)2006,JPO&NCIPI
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