发明名称 POSITION-DETECTING DEVICE AND BLURRING COMPENSATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a position-detecting device with reduced detection errors. SOLUTION: The position-detecting device 100 includes: a magnetic detector 110; and a relative movement section 120 that is provided opposite to the magnetic detector 110 and relatively moves along a predetermined flat surface, in parallel with the magnetic detector 110. In the relative movement section 120, N-poles and S-poles are arrayed in the relative movement direction, and a plurality of magnetic regions 121, 122 of the N and S poles are respectively and separately arranged in the direction orthogonal to the relative movement direction, and then a non-magnetic region 124 extending in the relative movement direction is arranged between a plurality of the magnetic regions 121, 122. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006250857(A) 申请公布日期 2006.09.21
申请号 JP20050070775 申请日期 2005.03.14
申请人 NIKON CORP 发明人 MATSUMOTO TAKESHI
分类号 G01B7/00;G03B5/00 主分类号 G01B7/00
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