| 摘要 |
PROBLEM TO BE SOLVED: To enable stable inspection with the same equipment, even in the case of package products having different structures and sizes, such as TCP and COF. SOLUTION: A pusher plate 201 includes a plurality of device holes 202-206 for each predetermined interval d and forms a pusher plate surface for crimping the whole surface of a pad on a tape input side 207 and a pad on a tape output side 208 (excluding device holes 202-206), and a plurality of edge surfaces 209 and tape surfaces (not shown). Each of the device holes 202-206 includes a heater hot-air evacuating port 210 at the center of each device hole and a heater hot-air evacuating port 211, on the side edge surface of each device hole on the side edge surface of pusher plate 201. A device-fixed absorption hole 212 is provided on the circumference of the device holes, except for the device hole with a device set thereto when measuring, in each device hole. COPYRIGHT: (C)2006,JPO&NCIPI
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