| 摘要 |
PROBLEM TO BE SOLVED: To provide an inspection method capable of certainly detecting even the presence of a fine crack or the like to perform inspection of high precision, and an inspection device. SOLUTION: In the inspection device 10, the center part 100c of a ferrite magnet 100 is held by a suction pad 21 having a bellows part 21c and the position where the amplitude of the vibration mode of the end part thereof is hit by a hitting part 30. By this constitution, the judgment due to a damping time is certainly performed and the defectiveness judging processing of a judge device 50 is performed with high precision to certainly inspect the presence of defectiveness such as a crack or the like. COPYRIGHT: (C)2006,JPO&NCIPI
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