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发明名称
METHOD AND APPARATUS FOR EUV LITHOGRAPHY
摘要
申请公布号
KR20060099698(A)
申请公布日期
2006.09.20
申请号
KR20050021080
申请日期
2005.03.14
申请人
HYNIX SEMICONDUCTOR INC.
发明人
EOM, TAE SEUNG
分类号
H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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