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发明名称
Method for reducing the charge-up ion of focused ion beam apparatu
摘要
申请公布号
KR100622805(B1)
申请公布日期
2006.09.18
申请号
KR20040115512
申请日期
2004.12.29
申请人
发明人
分类号
H01L21/265
主分类号
H01L21/265
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代理人
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