| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a system enhancing efficiency of removing VOC. <P>SOLUTION: By driving air blowing means 9, 10, air flows through a supply passage 4 and a delivery passage 5, moisture of air taken in from a chamber is first adsorbed in a moisture-adsorbing rotor 6 in the supply passage 4, dehydrated air contacts a VOC adsorbing rotor 7 in the downstream side, and VOC is adsorbed in the VOC adsorbing rotor 7. Moisture adsorbed in the moisture adsorbing rotor 6 enters the delivery passage 5 following the rotation of the moisture adsorbing rotor 6, and the moisture adsorbed in the moisture adsorbing rotor 6 is evaporated by the atmospheric air heated by a heating means 8. The hot air containing steam reaches the VOC adsorption rotor 7 in the downstream side, and VOC adsorbed in the VOC adsorbing rotor 7 is oxidized and decomposed or desorbed, and released to the outside via the delivery passage 5. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
