| 摘要 |
PROBLEM TO BE SOLVED: To increase the natural frequency of a secondary mode by the compound structure of a displacement section and a deformation section in a force detection sensor. SOLUTION: A microphone 10 comprises a parallel flat diaphragm section 200, a support section 600, a surface side deformation section 202, and a rear side deformation section 203. The parallel flat diaphragm section 200 is formed flatly. The support section 600 is positioned outside the parallel flat diaphragm section 200. The surface side deformation section 202 relatively connects the periphery of a surface side in the thickness direction of the parallel flat diaphragm section 200 to the support section 600. The rear side deformation section 203 relatively connects the periphery of the rear side in the thickness direction of the parallel flat diaphragm section 200 to the support section 600. When force operates on the parallel flat diaphragm section 200, the parallel flat diaphragm section 200 is displaced in the thickness direction of the parallel flat diaphragm section 200 to the support section 600 for the surface side deformation section 202 and the rear side deformation section 203. COPYRIGHT: (C)2006,JPO&NCIPI
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