| 摘要 |
PROBLEM TO BE SOLVED: To provide a carriage lifting type batch system atmospheric furnace, easy in maintenance, without making a dust enter a packing part. SOLUTION: In this batch system atmospheric furnace of a form called a hat kiln for lifting a carriage 3 having a furnace floor 6 to a furnace body 1, packing 7 for sealing a part between the furnace body and the carriage, is arranged on the under surface side of the furnace body. Thus, there is no risk of making the dust enter around the packing, and there is no risk of blocking up a sealing gas supply hole. A pressure sensor 12 for detecting leakage of a seal is arranged in a pipe for supplying sealing gas to detect the leakage of the seal. COPYRIGHT: (C)2006,JPO&NCIPI
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