DEVICE FOR MEASURING THREE-DIMENSIONAL SHAPE

摘要

PROBLEM TO BE SOLVED: To provide a device for measuring three-dimensional shape of high precision. SOLUTION: The XY table 130 provided on the stone plate 105 with a sliding mechanisms 133 and 134 composed of guide rails and base members in which a space 151 is formed inside the XY table. The accuracy of measuring the object to be measured can be improved by arranging an optical system 122 to the space for the reference plate for guiding the laser beam 111d to the reference plate provided on the XY table. COPYRIGHT: (C)2006,JPO&NCIPI