| 摘要 |
<P>PROBLEM TO BE SOLVED: To highly accurately and efficiently detect a mounting position of a sheet body mounted on a stage. <P>SOLUTION: A method for detecting the position of the sheet body comprises a step of moving a board F through an exposure stage 18, irradiating illumination light from stroboscopes 64a and 64b on each alignment mark 60a-60h formed on the board F at a prescribed interval, finding the average positions by acquiring a plurality of images at each alignment mark 60a-60h from CCD cameras 22a and 22b, and comparing them with a regulated position to calculate correction data of the mounting position of the board F. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
