发明名称 |
Oxygen doped SiC for Cu barrier and etch stop layer in dual damascene fabrication |
摘要 |
A method of forming a dual damascene structure with improved performance is described. A first etch stop layer comprised of oxygen doped SiC is deposited on a SiC barrier layer to form a composite barrier/etch stop layer on a substrate. The remainder of the damascene stack is formed by sequentially depositing a first dielectric layer, a second oxygen doped SiC etch stop layer, and a second dielectric layer. A via and overlying trench are formed and filled with a diffusion barrier layer and a metal layer. The oxygen doped SiC layers have a lower dielectric constant than SiC or SiCN and a higher breakdown field than SiC. The etch selectivity of a C<SUB>4</SUB>F<SUB>8</SUB>/Ar etch for a SiCOH layer relative to the oxygen doped SiC layer is at least 6:1 because of a lower oxygen content in the oxygen doped SiC layer.
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申请公布号 |
US2006202343(A1) |
申请公布日期 |
2006.09.14 |
申请号 |
US20060410718 |
申请日期 |
2006.04.25 |
申请人 |
CHARTERED SEMICONDUCTOR MANUFACTURING LTD. |
发明人 |
HUANG LIU;SUDIJONO JOHN;WEE KOH Y. |
分类号 |
H01L23/52;H01L21/768;H01L23/532 |
主分类号 |
H01L23/52 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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