| 摘要 |
PROBLEM TO BE SOLVED: To provide a photoacoustic microscope device for acquiring highly accurately at high speed information of the excitation state of the sample surface which is a measuring object, displaying the excitation state of the sample surface in a two-dimensional image, and outputting it. SOLUTION: Time-modulated excitation light is emitted from an excitation light source, and the excitation light reflected by a micro-mirror in the ON state is guided to the measuring object sample surface by a micro-mirror array space modulation element provided on an optical path of the excitation light. A photoacoustic signal generated by irradiating the sample surface with the excitation light is detected, and image information of the excitation state of the sample surface is generated by using an electric signal of the photoacoustic signal and position information of the micro-mirror in the ON state. COPYRIGHT: (C)2006,JPO&NCIPI
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