发明名称 |
Piezoelectric structure, liquid ejecting head and manufacturing method therefor |
摘要 |
A piezoelectric structure includes a vibrational plate; a piezoelectric film; the vibrational plate including a layer of a monocrystal material, a polycrystal material, a monocrystal material doped with an element which is different from an element constituting the monocrystal material, or a polycrystal material doped with an element which is different from an element constituting the polycrystal materials, and oxide layers sandwiching the aforementioned layer, the piezoelectric film has a single orientation crystal or monocrystal structure. <IMAGE> |
申请公布号 |
EP1231061(B1) |
申请公布日期 |
2006.09.13 |
申请号 |
EP20020002903 |
申请日期 |
2002.02.08 |
申请人 |
CANON KABUSHIKI KAISHA;WASA, KIYOTAKA |
发明人 |
UNNO, AKIRA;YONEHARA, TAKAO;FUKUI, TETSURO;MATSUDA, TAKANORI;WASA, KIYOTAKA |
分类号 |
B41J2/045;B41J2/16;B41J2/055;B41J2/135;B41J2/14;B41J2/145;H01L41/08;H01L41/09;H01L41/18;H01L41/22;H01L41/29;H01L41/319;H02N2/00 |
主分类号 |
B41J2/045 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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