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发明名称
METHOD FOR REMOVING A RESIDUE FROM A CHAMBER
摘要
申请公布号
KR20060096367(A)
申请公布日期
2006.09.11
申请号
KR20060020516
申请日期
2006.03.03
申请人
AIR PRODUCTS AND CHEMICALS, INC.
发明人
VRTIS RAYMOND NICHOLAS;LUKAS AARON SCOTT;O'NEILL MARK LEONARD;BITNER MARK DANIEL;XIANG XIAOHAI;KARWACKI EUGENE JOSEPH JR.
分类号
B08B3/08;B08B9/22;H01L21/31
主分类号
B08B3/08
代理机构
代理人
主权项
地址
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